Marc Kubly Phones & Addresses

  • Concord, CA
  • 46946 Lundy Ter, Fremont, CA 94539
  • 6114 La Salle Ave, Oakland, CA 94611
  • Sonoma, CA
  • 3811 95Th St, Seattle, WA 98115
  • Cupertino, CA
  • Redmond, WA
  • Bothell, WA
  • 7326 50Th Ave NE, Seattle, WA 98115


Company: Systron donner May 2004 Position: Equipment engineer


Microsoft Office • Manufacturing


Electrical/Electronic Manufacturing

Good Group


Marc Kubly Photo 1

Equipment Engineer

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San Francisco, CA
Electrical/Electronic Manufacturing
Systron Donner
Equipment Engineer
Microsoft Office

Us Patents

Methods And Apparatuses For Clamping And Declamping A Semiconductor Wafer In A Wafer Processing System

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US Patent:
57931925, Aug 11, 1998
Jun 28, 1996
Appl. No.:
Marc B. Kubly - Fremont CA
Neil Martin Paul Benjamin - Palo Alto CA
Steven Douglas Germain - Fremont CA
Lam Research Corporation - Fremont CA
International Classification:
G05F 304
H01G 2300
B23B 522
US Classification:
A method for clamping a wafer to an electrostatic chuck having a substantially resistive dielectric layer disposed thereon. The method includes the step of providing a build-up voltage having a first polarity to a pole of the electrostatic chuck to cause a potential difference to build up between a first region of the substantially resistive dielectric layer and a second region of the wafer that overlies at least a portion of the first region. This potential difference gives rise to a clamping force to clamp the wafer to the electrostatic chuck. The method further includes the step of terminating the build-up voltage when the clamping force substantially reaches a predefined level. There is further included the step of providing a holding voltage to the pole of the electrostatic chuck to substantially maintain the clamping force at the predefined level. This holding voltage has the first polarity and a magnitude that is lower than a magnitude of the build-up voltage.
Marc B Kubly from Concord, CA, age ~58 Get Report